Enhanced Sensitivity of Wireless Chemical Sensor Based on Love Wave Mode

A 440MHz wireless and passive Love-wave-based chemical sensor was developed for CO2 detection. The developed device was composed of a reflective delay line patterned on 41 YX LiNbO3 piezoelectric substrate, a poly(methyl methacrylate) (PMMA) waveguide layer, and Teflon AF 2400 sensitive film. A theoretical model is presented to describe wave propagation in Love wave devices with large piezoelectricity and to allow the design of an optimized structure. In wireless device testing using a network analyzer, infusion of CO2 into the testing chamber induced large phase shifts of the reflection peaks owing to the interaction between the sensing film and the test gas (CO2). Good linearity and repeatability were observed at CO2 concentrations of 0–350 ppm. The obtained sensitivity from the Love wave device was approximately 7.07 ppm . The gas response properties of the fabricated Love-wave sensor in terms of linearity and sensitivity were provided, and a comparison to surface acoustic wave devices was also discussed. [DOI: 10.1143/JJAP.47.7372]